Thermal compensation for large volume metrology and structures

Author: Yang Bingru   Ross-Pinnock David   Muelaner Jody   Mullineux Glen  

Publisher: Edp Sciences

E-ISSN: 2107-6847|8|issue|21-21

ISSN: 2107-6839

Source: International Journal of Metrology and Quality Engineering, Vol.8, Iss.issue, 2017-08, pp. : 21-21

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Abstract