Impact of environmental conditions on the reliability of MEMS components from optical applications

Author: Pustan Marius  

Publisher: Edp Sciences

E-ISSN: 2261-236x|137|issue|07006-07006

ISSN: 2261-236x

Source: MATEC Web of conference, Vol.137, Iss.issue, 2017-11, pp. : 07006-07006

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Abstract