Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia

Author： Liu Hua-Wen   Chen Tai-Hong   Chang Chun-Hao   Lu Shao-Kai   Lin Yi-Cyuan   Liu Day-Shan  

Publisher： MDPI

E-ISSN： 2076-3417|7|1|56-56

ISSN： 2076-3417

Source： Applied Sciences, Vol.7, Iss.1, 2017-01, pp. : 56-56

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Room Temperature Ammonia Gas Sensing Properties of Biosynthesized tin Oxide Nanoparticle Thin Films

By  

Current Nanoscience, Vol. 11, Iss. 2, 2015-04 ,pp. : 253-260

Bentham Science Publishers

Access to resources Recommend Favorite

Thermal Conductivity of Alumina Films Prepared by Inclined Incidence

By  

Current Nanoscience, Vol. 12, Iss. 5, 2016-08 ,pp. : 630-635

Bentham Science Publishers

Access to resources Recommend Favorite

Novel Iron-oxide Catalyzed CNT Formation on Semiconductor Silicon Nanowire

By  

Current Nanoscience, Vol. 10, Iss. 5, 2014-10 ,pp. : 695-699

Bentham Science Publishers

Access to resources Recommend Favorite

Characterization of Porous Anodic Aluminum Oxide Films by Luminescence Methods - A Review

By  

Current Nanoscience, Vol. 11, Iss. 5, 2015-10 ,pp. : 547-559

Bentham Science Publishers

Access to resources Recommend Favorite

Reel-to-Reel Atmospheric Pressure Dielectric Barrier Discharge (DBD) Plasma Treatment of Polypropylene Films

By Seidelmann Lukas JW   Bradley James W   Ratova Marina   Hewitt Jonathan   Moffat Jamie   Kelly Peter  

Applied Sciences, Vol. 7, Iss. 4, 2017-03 ,pp. : 337-337

MDPI

Access to resources Recommend Favorite