Epitaxial Defects in Nanoscale InP Fin Structures Revealed by Wet-Chemical Etching

Author： Van Dorp Dennis   Mannarino Manuel   Arnauts Sophia   Bender Hugo   Merckling Clement   Moussa Alain   Vandervorst Wilfried   Schulze Andreas   Caymax Matty  

Publisher： MDPI

E-ISSN： 2073-4352|7|4|98-98

ISSN： 2073-4352

Source： Crystals, Vol.7, Iss.4, 2017-03, pp. : 98-98

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