An Advanced Characterization Method for the Elastic Modulus of Nanoscale Thin-Films Using a High-Frequency Micromechanical Resonator

Author： Kim Yun Young  

Publisher： MDPI

E-ISSN： 1996-1944|10|7|806-806

ISSN： 1996-1944

Source： Materials, Vol.10, Iss.7, 2017-07, pp. : 806-806

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