A Low-G Silicon Inertial Micro-Switch with Enhanced Contact Effect Using Squeeze-Film Damping

Author： Peng Yingchun Wen Zhiyu Li Dongling Shang Zhengguo

Publisher： MDPI

E-ISSN： 1424-8220|17|2|387-387

ISSN： 1424-8220

Source： Sensors, Vol.17, Iss.2, 2017-02, pp. : 387-387

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