Characterization of Fiber-Like SiCN Formed during the Nitridation of Silicon

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2018|281|330-335

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2018, Iss.281, 2018-10, pp. : 330-335

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract