Ion Implanted Photoresist Removal by Material Loss-Free Organic Solvent

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2018|282|52-56

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 52-56

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Organic Material Removal by Thermally Activated Ozone Gas

By  

Solid State Phenomena, Vol. 2018, Iss. 282, 2018-10 ,pp. : 19-24

Trans Tech Publications

Access to resources Recommend Favorite

Volatile Organic Compounds Trapping from Gaseous Samples on the Basis of Co-Liquefaction with Organic Solvent for Gas Chromatographic Analysis

By  

Current Analytical Chemistry, Vol. 13, Iss. 5, 2017-08 ,pp. : 393-401

Bentham Science Publishers

Access to resources Recommend Favorite

Wet Etchants Penetration through Photoresist during Wet Patterning

By  

Solid State Phenomena, Vol. 2018, Iss. 282, 2018-10 ,pp. : 141-146

Trans Tech Publications

Access to resources Recommend Favorite

Nanostructural Study of Silicon-Cobalt/Nitrogen-Doped Reduced Graphene Oxide Composites by Electron Microscopy for Using as Anode Material in Lithium-Ion Batteries

By  

Solid State Phenomena, Vol. 2018, Iss. 283, 2018-10 ,pp. : 37-45

Trans Tech Publications

Access to resources Recommend Favorite

Hydrothermal Synthesis of Fe3O4@C Spheres as Anode Material for Lithium-Ion Batteries

By  

Solid State Phenomena, Vol. 2018, Iss. 281, 2018-10 ,pp. : 801-806

Trans Tech Publications

Access to resources Recommend Favorite