Oxygen Atmosphere Annealing Effect on the Thermal Stability of TiO_2-x Based Films for Shutter-Less Infrared Image Sensors

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2018|775|272-277

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2018, Iss.775, 2018-09, pp. : 272-277

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