Influence of beam radius on deposition parameters in dielectric under high energy electron irradiation

Author： Zuo Yinghong  

Publisher： Edp Sciences

E-ISSN： 2261-236x|189|issue|09001-09001

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.189, Iss.issue, 2018-08, pp. : 09001-09001

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