Growth of Sb-Doped β-FeSi₂ Epitaxial Films and Optimization of Donor Activation Conditions

E-ISSN： 1662-9507|2018|386|38-42

ISSN： 1012-0386

Source： Defect and Diffusion Forum, Vol.2018, Iss.386, 2018-11, pp. : 38-42

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