Technological Features of the Thick Tin Film Deposition by with Magnetron Sputtering Form Liquid-Phase Target

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2018|781|8-13

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2018, Iss.781, 2018-10, pp. : 8-13

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