Effect of Gas Dilution Ratios and Substrate Temperature on the Structural Transition of a-Si/μc-Si Thin-Film Solar Cell Using PECVD

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2018|786|373-383

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2018, Iss.786, 2018-11, pp. : 373-383

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