Influence of layer type and order on barrier properties of multilayer PECVD barrier coatings

Publisher: IOP Publishing

E-ISSN: 1361-6463|47|1|15201-15208

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.1, 2014-01, pp. : 15201-15208

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Abstract