A parametric study of non-thermal plasma synthesis of silicon nanoparticles from a chlorinated precursor

Publisher: IOP Publishing

E-ISSN: 1361-6463|47|48|485202-485210

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.48, 2014-12, pp. : 485202-485210

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Abstract