Clamping effect by the substrate on the intrinsic stress in polycrystalline films

Author： González-González A   Polop C   Vasco E  

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|2|25301-25309

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.2, 2015-01, pp. : 25301-25309

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