Numerical investigation of HBr/He transformer coupled plasmas used for silicon etching

Author： Gul Banat Tinck Stefan Rehman Aman-ur- Bogaerts Annemie Gul Banat

E-ISSN： 1361-6463|48|2|25202-25210

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.2, 2015-01, pp. : 25202-25210

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