Modification of Akhieser mechanism in Si nanomembranes and thermal conductivity dependence of the Q-factor of high frequency nanoresonators

Publisher： IOP Publishing

E-ISSN： 1361-6641|29|12|124010-124014

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.12, 2014-12, pp. : 124010-124014

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