The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

Author: Schulze J   Donkó Z   Derzsi A   Korolov I   Schuengel E  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|1|15019-15031

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15019-15031

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Abstract