An open-ended coaxial plasma source with extended operating parameters: plasma impedance, coupling and energy efficiency

Publisher： IOP Publishing

E-ISSN： 1361-6595|23|6|64006-64011

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 64006-64011

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