Calibration of the straightness and orthogonality error of a laser feedback high-precision stage using self-calibration methods

Publisher： IOP Publishing

E-ISSN： 1361-6501|25|12|125007-125016

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.12, 2014-12, pp. : 125007-125016

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