Precise Measurement of the Thickness of a Dielectric Layer on a Metal Surface by Use of a Modified Otto Optical Configuration

Author： Kaneoka Yoshiki   Nishigaki Kentaro   Mizutani Yasuhiro   Iwata Tetsuo  

Publisher： Taylor & Francis Ltd

E-ISSN： 1559-9620|9|1|48-61

ISSN： 1559-9612

Source： International Journal of Optomechatronics, Vol.9, Iss.1, 2015-01, pp. : 48-61

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