A study of trap-limited conduction influenced by plasma damage on the source/drain regions of amorphous InGaZnO TFTs

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|44|445104-445113

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.44, 2014-11, pp. : 445104-445113

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