Spectroscopic study of neutral species in a planar-coil inductive discharge in hydrogen

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|48|485204-485213

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.48, 2015-12, pp. : 485204-485213

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Abstract