Novel Slurry Injection System for Improved Slurry Flow and Reduced Defects in CMP

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2014|219|143-147

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2014, Iss.219, 2014-01, pp. : 143-147

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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