Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

E-ISSN： 1612-8869|12|10|1174-1185

ISSN： 1612-8850

Source： PLASMA PROCESSES AND POLYMERS (ELECTRONIC), Vol.12, Iss.10, 2015-10, pp. : 1174-1185

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