Deposition and characterization of TiZrV-Pd thin films by dc magnetron sputtering

Author： Jie Wang Bo Zhang Yan-Hui Xu Wei Wei Le Fan Xiang-Tao Pei Yuan-Zhi Hong Yong Wang

ISSN： 1674-1137

Source： Chinese Physics C, Vol.39, Iss.12, 2015-12, pp. : 127007-127011

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