Co-sputtering NbTiN thin films on PSG/Si substrates

Author: Wang Chen   Zhang Jingjiao   Zhang Lu   You Lixing   Su Xiaodong  

Publisher: IOP Publishing

E-ISSN: 1361-6668|29|2|25005-25010

ISSN: 0953-2048

Source: Superconductor Science and Technology, Vol.29, Iss.2, 2016-02, pp. : 25005-25010

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Abstract