Study on 6H-SiC Crystal Substrate (0001) C Surface in FA-CMP Based on Diamond Particle

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2015|727|244-247

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2015, Iss.727, 2015-03, pp. : 244-247

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Abstract