Sinc2 fitting for height extraction in confocal scanning

Author: Tan Jiubin   Liu Chenguang   Wang Hongting   Liu Jian  

Publisher: IOP Publishing

E-ISSN: 1361-6501|27|2|25006-25011

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.27, Iss.2, 2016-02, pp. : 25006-25011

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Abstract