The influence of electron reflection/sticking coefficients at the electrodes on plasma parameters in particle-in-cell simulations of capacitive radio-frequency plasmas

Author： Korolov I   Derzsi A   Donkó Z   Schüngel E   Schulze J  

Publisher： IOP Publishing

E-ISSN： 1361-6595|25|1|15024-15037

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15024-15037

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