Investigation of Interface State Density with Varied SiO2 Thickness in La2O3/SiO2/4H-SiC MOS Capacitors

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|689-692

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 689-692

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Abstract