Nondestructive and Local Evaluation of SiO₂/SiC Interface Using Super-Higher-Order Scanning Nonlinear Dielectric Microscopy

Publisher： Trans Tech Publications

E-ISSN： 1662-9752|2016|858|469-472

ISSN： 0255-5476

Source： Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 469-472

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Abstract

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