Capacitive Properties of MIS Structures with SiOx and SixOyNz Films Containing Si Nanoclusters

Publisher: Trans Tech Publications

E-ISSN: 1661-9897|2016|39|162-168

ISSN: 1662-5250

Source: Journal of Nano Research, Vol.2016, Iss.39, 2016-03, pp. : 162-168

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Abstract