Tribological Properties of Magnetron Sputtered Amorphous Silicon Carbide and Silicon Carbonitride Coatings

Publisher: Trans Tech Publications

E-ISSN: 1662-9507|2016|368|91-94

ISSN: 1012-0386

Source: Defect and Diffusion Forum, Vol.2016, Iss.368, 2016-08, pp. : 91-94

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