Advances in 3x150 mm Hot-Wall and 6x150 mm Warm-Wall SiC Epitaxy for 10kV-Class Power Devices

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2016|858|167-172

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2016, Iss.858, 2016-06, pp. : 167-172

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Abstract