Interest of Pulsed and Modulated dc Discharges for Depositing Insulating Compounds by Reactive Magnetron Sputtering

E-ISSN： 1286-4897|6|9|1181-1187

ISSN： 1155-4320

Source： Journal de Physique III, Vol.6, Iss.9, 1996-09, pp. : 1181-1187

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