Laser plasma sources for soft X-ray projection lithography

E-ISSN： 1286-4897|4|9|1669-1677

ISSN： 1155-4320

Source： Journal de Physique III, Vol.4, Iss.9, 1994-09, pp. : 1669-1677

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Liquid-jet laser-plasma X-ray sources for microscopy and lithography

Le Journal de Physique IV, Vol. 11, Iss. PR2, 2001-07 ,pp. : Pr2-389-Pr2-396

Edp Sciences

Access to resources Recommend Favorite

Key methods for intensifying soft X-ray emission from a laser plasma for lithography

By Andreev A. Nikolaev V. Platonov K. Kurakin Yu.

Technical Physics, Vol. 52, Iss. 6, 2007-06 ,pp. : 739-746

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Brilliance improvement of laser-produced soft x-ray plasma by a barrel shock

New Journal of Physics, Vol. 14, Iss. 7, 2012-07 ,pp. : 758-771

IOP Publishing

Access to resources Recommend Favorite

SOFT X-RAY LASER CAVITIES

Le Journal de Physique Colloques, Vol. 47, Iss. C6, 1986-10 ,pp. : C6-277-C6-286

Edp Sciences

Access to resources Recommend Favorite

X-ray gratings and projection lithography by means of laterally structured multilayers

Journal de Physique III, Vol. 4, Iss. 9, 1994-09 ,pp. : 1625-1637

Edp Sciences

Access to resources Recommend Favorite