MICRO ELECTRO MECHANICAL SYSTEMS (MEMS): TECHNOLOGY, FABRICATION PROCESSES AND APPLICATIONS

MICRO ELECTRO MECHANICAL SYSTEMS (MEMS): TECHNOLOGY, FABRICATION PROCESSES AND APPLICATIONS

CONTENTS

PREFACE

Chapter 1 A SYSTEMATIC APPROACH FOR ANALYZING ELECTRONICALLY MONITORED ADHERENCE DATA

Abstract

Introduction

I. Analysis of MEMS Adherence Data

II. Example Analyses

II.1. Unit Dispersion Analyses

II.1.1. Individual-Subject Analyses

II.1.2. Cluster Analyses

II.1.3. Characterization of At Least Moderately High Mean Adherence

II.1.4. Characterization of Very High Mean Adherence

II.1.5. Summary of Unit Dispersion Analyses

II.2. Adaptive Dispersion Analyses

II.2.1. Individual-Subject Analyses

II.2.2. Cluster Analyses

II.2.3. Characterization of at Least High Adherence

II.2.4. Summary of Adaptive Dispersion Analyses

III. Adaptive Extended Quasi-Likelihood Modeling

III.1. Background

III.2. Extended Generalized Linear Modeling

III.3. Extended Quasi-Likelihood Cross-Validation (Q+LCV)

III.4. Extended Poisson Regression Modeling of MEMS Data

III.5. Percent Consistency of Observed Adherence with Prescribed Adherence

III.6. Heuristic Model Selection

IV. Adaptive Cluster Analysis

IV.1. Parameter Estimation

IV.2. Likelihood Cross-Validation (LCV) for Cluster Analysis

IV.3. Alternate Clustering Procedures

IV.4. Clustering of MEMS Adherence Patterns

V. SAS Macros for Analyzing Electronically Monitored Adherence Data

V.1. Grouping Adherence Data

V.2. Adaptive Modeling of Adherence over Time for One Subject

V.3. Adaptive Modeling of Individual-Subject Adherence over Time for Multiple Subjects

V.4. Adaptive Modeling of Adherence for All Subjects Combined Together

V.5. Adaptive Clustering of Mean Adherence Patterns

V.6. Adaptive Modeling of Cluster Membership

V.7. Modeling Adherence Variability along with Mean Adherence

Conclusion

Acknowledgment

References

Chapter 2 DESIGN FOR RELIABILITY OF MICROMECHATRONIC STRUCTURAL SYSTEMS

Abstract

1. Introduction

2. Electromechanical Coupling at Microscale

2.1. MEMS Typologies: Contactless and Smart Microsystems

2.2. Volume and Surface Electromechanical Coupling

2.3. Thermal Effects in MEMS

3. Structural Elements in MEMS

3.1. MEMS Compliance and Stiffness

3.2. MEMS Architecture and Constraints

4. Static Loading of Structural Elements in MEMS

4.1. Electromechanical Nonlinear Actions

4.2. Initial Residual Stress and Strain

4.3. Mechanical Coupling and Geometric Nonlinearity

4.4. Superposition of Different Phenomena

4.5. Structural Buckling

4.6. Critical Issues and Approaches in Numerical Modelling of Static Loading in MEMS

5. Dynamic Loading of Structural Elements in MEMS

5.1. Observed Phenomena

5.2. Dynamic Electromechanical Coupling

6. Other Electromechanical Couplings in MEMS

6.1. Microsystems Based on Smart Materials

6.2. Microsystems Based on Magnetic Actions

7. Thermo-Mechanical Behaviour

7.1. Effects of Constraints and Thermal Stress

7.2. Material Behaviour in Presence of Thermal Stress

7.3. Material Behaviour in Presence of Thermal Fatigue and Creep

7.4. Combined Thermo-Mechanical Excitation and Phase Analysis

8. Mechanical and Thermal Fatigue

8.1. Mechanical Excitation

8.2. Thermo-mechanical Excitation

8.3. Role of Oxidation in Fatigue Crack Generation and Propagation

8.4. Combined Creep and Thermal Fatigue

8.5. Thermo-Mechanical Effects on the MEMS Material

8.6. Comparison between Thermo-Mechanical and Mechanical Fatigue

9. Modelling Thermo-Mechanical Fatigue

9.1. Life Prediction in Presence of Combined Thermo-Mechanical Fatigue

9.2. Crack Propagation Induced by Thermo-Mechanical Fatigue

10. Experimental Testing for Reliability Prediction in MEMS

10.1. Damage Prevention

10.2. Morphological Analysis

10.3. Material Characterization

10.4. Static Functionality

10.5. Dynamic Functionality

10.6. Fatigue

Aknowledgement

About the Author

References

Chapter 3 POWER MEMS: AN IMPORTANT CATEGORY OF MEMS

Abstract

1. Introduction

2. Micro Thermophotovoltaic (TPV) Power Generator

2.1. Introduction

2.2. Effect of Backward Facing Step Height

2.3. Effect of Wall Thickness

2.4. Effect of Flow Rate

2.5. Effect of Combustion Chamber

2.6. Effect of Fuel/oxidant Mixture Type

3. Micro Direct Methanol Fuel Cell (DMFC)

3.1. Introduction

3.2. Effect of Current Collector Structure on Micro DMFC

3.3. Effect of Methanol Concentration on Micro DMFC

3.4. Effect of Operating Temperature on Micro DMFC

4. MEMS Based Solid Propellant Micropropulsion Systems

4.1. Introduction

4.2. Three-layer Sandwich Design of Solid Propellant Microthruster

4.3. Two-layer Building Block Design of Solid Propellant Microthruster

4.4. Fabrication of the Two-layer Building Block Microthruster

4.5. Combustion and Thrust Tests of the Two-layer Building Block Microthruster

4.6. Ignition Study of the Two-layer Building Block Microthruster

5. Micro Scale Combustion

5.1. Introduction

5.2. Key Issues and Major Challenges

5.3. Progress so Far

5.4. Practical Micro-combustors

Swiss-roll Micro-combustors

Cylindrical Tubes with Backward-facing Steps

5.5. Future Work

5.5.1. Catalyzed Micro-combustion

5.5.2. Filtration (Porous Media) Micro-combustion

6. Other Power MEMS Systems

6.1. Micro Heat Engine

6.2. Thermoelectric Micro Power Generator and Micro Cooler

6.3. Mechanical Energy Scavengers

6.4. Nano Energetic Material Based Power MEMS Systems

7. Conclusion

References

Chapter 4 STRUCTURE AND STABILITY OF SILICON CLUSTERS STABILIZED BY HYDROGEN AT HIGH TEMPERATURES

Abstract

1. Introduction

2. Application of Silicon Nanoparticles and Processes of Their Production

3. Potential Functions for Covalent Bonds

4. Representation of the Si-H and H-H Interactions

5. The Molecular Dynamics Model

5.1. 73Si Nanoparticles

5.2. 73Si Nanoparticles Surrounded by Hydrogen

5.3.60Si Fullerenes Stabilized with Hydrogen

6. Silicon-Silicon Bond Angles

7. Phase Transition in Nanoparticle 73Si

8. The Influence of Hydrogen on the Stability of 73Si Nanoparticles

9. Structure of 73Si Nanoparticles in the Presence of Hydrogen on their Surface

10. Structure of 60Si Clusters in the Presence of Hydrogen

11. Parameters of the Si-Si Bonds in 60Si Clusters Stabilized with Hydrogen

12. Coefficients of Diffusion and Linear Expansion

13. Conclusion

Acknowledgments

References

Chapter 5 DESIGN OF OPTICAL MEMS FOR TRANSPARENT BIOLOGICAL CELL CHARACTERIZATION

Abstract

1. Introduction

2. Device Design

3. Theory

4. Critical Gap

5. Shape of the Aperture

6. Shape of the Chamber

7. Extrapolating the Refractive Index

8. Limit of Detection

9. Experiment

10. Conclusion

References

Chapter 6 NANOMOTORS ACTUATED BY PHONON CURRENT

Abstract

1. Introduction

2. Theoretical Mechanism

2.1. Thermomass of Phonon Gas

2.2. Hydrodynamics of Thermomass Motion

2.3. Actuation by Phonon Current

3. CNTS Based Nanomotors

3.1. MD Simulation Details

3.2. Operation Behaviors

4. Conclusion

Acknowledgment

References

Chapter 7 TANGENTIAL NANOFRETTING AND RADIAL NANOFRETTING

Abstract

1. Introduction

2. Tangential Nanofretting

2.1. The Effect of Adhesion Force on the Regimes of Tangential Nanofretting [9]

2.2. The Damage Mode of Tangential Nanofretting [10]

2.3. The Transition between Two Damage Modes

2.4. Comparison of Tangential Nanofretting and Fretting [1]

2.5. Comparison of Nanofretting in Atmosphere and in Vacuum

3. Radial Nanofretting

3.1. Radial Nanofretting on Silicon and Copper [11]

3.2. Radial Nanofretting on 40Cr Steel and its CrNx Coating [12]

3.3. Effect of Equivalent Radius of Indenter on Radial Nanofretting [13]

4. Conclusions

Acknowledgments

References

Chapter 8 ADAPTIVE POISSON MODELING OF MEDICATION ADHERENCE AMONG HIV-POSITIVE METHADONE PATIENTS PROVIDED GREATER UNDERSTANDING OF BEHAVIOR

Abstract

Objective

Study Design and Setting

Results

Conclusions

Introduction

Methods

Health Incentives Project

Overview of the Modeling Process

Data Reduction

Data Modeling

Model Evaluation

Model Selection

Overall Adherence Assessment

Intervention Phase Mean Adherence Clusters

Results

Individual-Subject Overall Mean Adherence Patterns

Summary Adherence Measures: Percent Consistency versus Percent Prescribed Doses Taken (PDT)

Association of Summary Adherence Measures with Study Group

Intervention Phase Adherence

Intervention Phase Mean Adherence Pattern Types

Conclusion

Acknowledgments

References

Chapter 9 ROBUST ADAPTIVE CONTROL FOR MEMS VIBRATORY GYROSCOPE

Abstract

1. Introduction

2. Dynamics of MEMS Gyroscope

3. Adaptive Sliding Mode Controller

3.1. Adaptive Sliding Mode Controller Design and Stability Analysis

3.2. Comparison with Standard Adaptive Controller

3.3. Adaptive Sliding Mode Design under Asymmetric Coupling Term

4. Simulation of MEMS Gyroscope

5. Conclusion

References

Chapter 10 THE ELECTRIC FORCE ON THE MOVING ELECTRODE OF AN INCLINED PLATE CAPACITOR

Abstract

Introduction

2. Region Mapping and Energy Calculation

3. Electric Force on the Electrode Plate

4. Characteristics of the Force

5. Further Discussion

6. Moving Plate

7. Deformation of the Plate

8. Conclusion

Acknowledgments

References

Chapter 11 PORTABLE DIAGNOSTIC TECHNOLOGIES FOR RESOURCE POOR ENVIRONMENTS

Abstract

Introduction

Possible Future Trends

Outlook

References

Chapter12BALLISTICTRANSPORTTHROUGHQUANTUMWIRESANDRINGS

Abstract

1.Introduction

2.TheScatteringApproach

3.ScatteringTheoryinBallisticQ1DWires

3.1.ScatteringandtheLippmann-SchwingerEquation

3.2.ConservationofEnergyandScatteringProcesses

3.3.BornApproximationinQ1DScattering

4.ConductancethroughQuantumWireswithScatterers

4.1.2D-functionScatteringPotential

4.1.1.Conductance

4.1.2.EffectoftheNumberofModes

4.1.3.BornApproximation

4.2.RectangularScatteringPotential

4.2.1.NumericalMethod

4.2.2.Conductance

4.2.3.BornApproximation

4.3.GaussianScatteringPotential

4.3.1.Conductance

4.3.2.BornApproximation

5.FanoResonancesinTransportthroughQuantumWires

5.1.FeshbachTheoryinQ1DSystems

5.2.Short-RangeScatteringPotentialwithLateralExtent

5.2.1.FanoResonancesintheTransmissionProbability

5.2.2.TemperatureDependenceofFanoResonances

5.2.3.EffectofaTransverseElectricField

5.3.P¨oschl-TellerScatteringPotential

6.ResonancesinMesoscopicOpenRings

6.1.TransmissionProbabilityoftheRing

6.1.1.Aharonov-BohmEffect

6.1.2.RingwithoutScatteringintheBranches

6.1.3.RingwithScatteringintheBranches

7.ConcludingRemarks

AppendixA.EvaluationofMatrixElements

AppendixB.RangeofValidityoftheTwo-ChannelApproach

AppendixC.CalculationofWaveFunctionAmplitudesintheRing

References

Chapter13LATTICEBOLTZMANNMODELASANINNOVATIVEMETHODFORMICROFLUIDICS

Abstract

1.Introduction

2.ConceptsoftheLBM

3.LBMforMicroflows

4.OutlookandFurtherChallenges

5.Conclusion

References

INDEX

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