Strain and amorphization under light-ion implantation in SiC

Author: Leclerc S.   Beaufort M. F.   Barbot J. F.   Declémy A.  

Publisher: Edp Sciences

E-ISSN: 1286-4854|98|4|46001-46001

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.98, Iss.4, 2012-05, pp. : 46001-46001

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract