Transition from E to H mode in inductively coupled oxygen plasma: Hysteresis and the behaviour of oxygen atom density

Author： Zaplotnik R.   Vesel A.   Mozetic M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|95|5|55001-55001

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.95, Iss.5, 2011-08, pp. : 55001-55001

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Influence of a phase-locked RF substrate bias on the E- to H-mode transition in an inductively coupled plasma

By  

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44006-44018

IOP Publishing

Access to resources Recommend Favorite

Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model

By  

Chinese Physics B, Vol. 24, Iss. 11, 2015-11 ,pp. : 115201-115207

IOP Publishing

Access to resources Recommend Favorite

Actions of low- and high-energy electrons on the phase transition between E- and H-modes in an inductively coupled plasma in Ar

By  

New Journal of Physics, Vol. 13, Iss. 7, 2011-07 ,pp. : 443-453

IOP Publishing

Access to resources Recommend Favorite

Electron heating during E-H transition in inductively coupled RF plasmas

By  

Plasma Sources Science and Technology, Vol. 24, Iss. 4, 2015-01 ,pp. : 44001-44009

IOP Publishing

Access to resources Recommend Favorite

Computer simulations of an oxygen inductively coupled plasma used for plasma-assisted atomic layer deposition

By Tinck S   Bogaerts A  

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15008-15017

IOP Publishing

Access to resources Recommend Favorite