Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process

Publisher： Edp Sciences

E-ISSN： 1286-4854|85|1|15002-15002

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.85, Iss.1, 2009-01, pp. : 15002-15002

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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