Reduction of transient regime in fast preionized high-power pulsed-magnetron discharge

E-ISSN： 1286-4854|72|3|390-395

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.72, Iss.3, 2005-11, pp. : 390-395

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Ion flux characteristics in high-power pulsed magnetron sputtering discharges

EPL (EUROPHYSICS LETTERS), Vol. 77, Iss. 4, 2007-02 ,pp. : 45002-45002

Edp Sciences

Access to resources Recommend Favorite

Dependence of ion current on magnetic unbalancing in high power pulsed magnetron glow discharge

Journal of Physics: Conference Series , Vol. 518, Iss. 1, 2014-06 ,pp. : 46-51

IOP Publishing

Access to resources Recommend Favorite

Dynamics of pre-ionized fast capillary discharge

By Hübner J Vrba P Straus J Jancarek A Nevrkla M

Physica Scripta, Vol. 2014, Iss. 161, 2014-05 ,pp. : 14047-14051

IOP Publishing

Access to resources Recommend Favorite

The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering

By Anders A Čapek J Hála M Martinu L

Journal of Physics D: Applied Physics, Vol. 45, Iss. 1, 2012-01 ,pp. : 12003-12007

IOP Publishing

Access to resources Recommend Favorite

Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

By Kozyrev A. Sochugov N. Oskomov K. Zakharov A. Odivanova A.

Plasma Physics Reports, Vol. 37, Iss. 7, 2011-07 ,pp. : 621-627

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite