The effect of radio frequency power on the structural and optical properties of a-C:H films prepared by PECVD

Publisher： Cambridge University Press

E-ISSN： 2044-5326|32|7|1231-1238

ISSN： 0884-2914

Source： Journal of Materials Research, Vol.32, Iss.7, 2017-01, pp. : 1231-1238

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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