Electron Beam-Induced Deposition for Atom Probe Tomography Specimen Capping Layers

Publisher: Cambridge University Press

E-ISSN: 1435-8115|23|2|321-328

ISSN: 1431-9276

Source: Microscopy and Microanalysis, Vol.23, Iss.2, 2016-10, pp. : 321-328

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Abstract