Single-atom fabrication with electron and ion beams: From surfaces and two-dimensional materials toward three-dimensional atom-by-atom assembly

Publisher： Cambridge University Press

E-ISSN： 1938-1425|42|9|637-643

ISSN： 0883-7694

Source： MRS Bulletin, Vol.42, Iss.9, 2017-09, pp. : 637-643

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