Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films

Publisher： John Wiley & Sons Inc

E-ISSN： 1099-0682|2018|1|46-53

ISSN： 1434-1948

Source： EUROPEAN JOURNAL OF INORGANIC CHEMISTRY (ELECTRONIC), Vol.2018, Iss.1, 2018-01, pp. : 46-53

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