DFT Study on the Gas‐Phase Potential Energy Surface Crossing Mechanism of ZnO Formation from Diethylzinc and Triplet Oxygen during Metal‐Organic Chemical Vapor Deposition

Publisher： John Wiley & Sons Inc

E-ISSN： 2365-6549|3|7|1961-1966

ISSN： 2365-6549

Source： ChemistrySelect, Vol.3, Iss.7, 2018-02, pp. : 1961-1966

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