Fast preparation of (111)‐oriented β‐SiC films without carbon formation by laser chemical vapor deposition from hexamethyldisilane without H2

Publisher： John Wiley & Sons Inc

E-ISSN： 1551-2916|101|4|1471-1478

ISSN： 0002-7820

Source： JOURNAL OF THE AMERICAN CERAMIC SOCIETY, Vol.101, Iss.4, 2018-04, pp. : 1471-1478

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