A system for monitoring the ion current in the ILU-3 implanter

Author： Nuzhdin V.   Valeev V.   Konovalov D.   Petukhov V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-4412

Source： Instruments and Experimental Techniques, Vol.54, Iss.5, 2011-09, pp. : 729-731

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